Applications of plasma processes to VLSI technology
Enregistré dans:
Auteurs principaux : | , |
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Format : | Livre |
Langue : | anglais japonais |
Titre complet : | Applications of plasma processes to VLSI technology / edited by Takuo Sugano; translated by Hyo-gun Kim |
Publié : |
New York :
Wiley
, c1985 |
Description matérielle : | xiv, 394 p. |
Œuvre : | Handōtai purazuma purosesu gijutsu. English |
Sujets : |
LEADER | 01369cam a2200409 4500 | ||
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001 | PPN061774669 | ||
003 | http://www.sudoc.fr/061774669 | ||
005 | 20201209055900.0 | ||
010 | |a 0-471-86960-0 | ||
020 | |a US |b 853255 | ||
035 | |a (OCoLC)11754602 | ||
100 | |a 20020718d1985 u y0undy0103 ba | ||
101 | 1 | |a eng |a jpn | |
102 | |a US | ||
105 | |a a a 001|y | ||
181 | |6 z01 |c txt |2 rdacontent | ||
181 | 1 | |6 z01 |a i# |b xxxe## | |
182 | |6 z01 |c n |2 rdamedia | ||
182 | 1 | |6 z01 |a n | |
200 | 0 | |a Applications of plasma processes to VLSI technology |f edited by Takuo Sugano |g translated by Hyo-gun Kim | |
210 | |a New York |c Wiley |d c1985 | ||
215 | |a xiv, 394 p. |c ill. |d 24 cm | ||
300 | |a Translation of: Handōtai purazuma purosesu gijutsu | ||
300 | |a "A Wiley-Interscience publication." | ||
300 | |a Includes index | ||
320 | |a Bibliography: p. 369-389. | ||
500 | | | | | |a Handōtai purazuma purosesu gijutsu |m English |
606 | |3 PPN027237737 |a Métallurgie |2 rameau | ||
606 | |3 PPN027895823 |a Circuits intégrés à très grande échelle |2 rameau | ||
676 | |a 621.381/73 |v 19 | ||
680 | |a TK7871.85 |b .H34713 1985 | ||
700 | 1 | |3 PPN251007642 |a Sugano |b Takuo |f 1931- |4 651 | |
701 | 1 | |3 PPN25100807X |a Kim |b Hyo-gun |4 730 | |
801 | 3 | |a FR |b Abes |c 20201208 |g AFNOR | |
801 | 2 | |b CStRLIN |g AACR2 | |
930 | |5 441092105:155516906 |b 441092105 |j u | ||
998 | |a 5410 |