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MEMS/NEMS : Handbook Techniques and Applications
Micro-Electro Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate. While the electronics are fabricated using integrated circuit (IC) process sequences (e.g., CMOS, Bipolar, or BICMOS processes), the micromechanical c...
Enregistré dans:
| Auteur principal : | |
|---|---|
| Format : | Livre |
| Langue : | anglais |
| Titre complet : | MEMS/NEMS : Handbook Techniques and Applications / edited by Cornelius T. Leondes. |
| Publié : |
New York, NY :
Springer US
, 2006 Cham : Springer Nature |
| Accès en ligne : |
Accès Nantes Université
Accès direct soit depuis les campus via le réseau ou le wifi eduroam soit à distance avec un compte @etu.univ-nantes.fr ou @univ-nantes.fr |
| Note sur l'URL : | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex |
| Condition d'utilisation et de reproduction : | Conditions particulières de réutilisation pour les bénéficiaires des licences nationales : chttps://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 |
| Sujets : | |
| Documents associés : | Autre format:
Mems/Nems Autre format: Mems/Nems Autre format: Mems/Nems |
- Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices
- Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS
- Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
- Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications
- Techniques in Global Optimal Design for MEMS & Their Applications
- Theory and Design of Micromechanical Vibratory Gyroscopes
- A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)
- Techniques in Electrostatics Analysis of MEMS and Their Applications
- Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
- Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
- Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
- GaAs Thermally Based MEMS Devices Fabrication Techniques, Characterization and Modeling
- Novel MEMS Fluidic Integrated Circuit Technology with MOSFET-Like Microvalve Elements
- Hydrogel-based ?TAS
- Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
- MEMS/NEMS Techniques and Applications
- Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology
- Tool-based Micro Machining and Applications in MEMS
- Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application
- Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
- Injection Molding Techniques for the Fabrication of MEMS Elements
- Excimer Laser Micromachined Three-dimensional Microstructures Techniques and Applications
- Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems
- Production Scheduling in MEMS Manufacturing
- MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
- Micromachined Thermal Accelerometer without Proof Mass
- Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications
- Modeling the Electromechanical Response of Electrostatic Actuators
- Micropumps for MEMS/NEMS and Microfluidic Systems
- FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators
- Techniques in the Design of Thermomechanical Microactuators
- Techniques in MEMS Microthermal Actuators and Their Applications
- Techniques in Residual Stress Measurement for MEMS and Their Applications
- Techniques in Sonophoresis Biomedical Devices and Their Applications
- MEMS Application of Actuators and Sensors for Glaucoma Treatment
- Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications
- Techniques in the Development of Endovascular Microtools & Their Applications
- Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems
- Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors
- Magnetic Microactuators Techniques and Applications
- Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
- Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications
- Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications.