Journal of vacuum science & technology : B Microelectronics and nanometer structures processing, measurement and phenomena

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Bibliographic Details
Main Author : American vacuum society (Auteur)
Format : Journal
Language : anglais
Title statement : Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena
Published : New York : Published for the Society by the American Institute of Physics , 1991-2009
Subjects :
Related Items : Continues: Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Continued by: Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print)
Additional physical form: Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online)
Related to: JVST. A & B (CD-ROM ed.)
Related to: Proceedings of the Molecular Beam Epitaxy Workshop
Related to: Proceedings of the U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds
Related to: Papers from the International Symposium on Electron, Ion, and Photon Beams
Related to: Papers from the North American Conference on Molecular Beam Epitaxy
Related to: Proceedings of the International Vacuum Microelectronics Conference
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