Nantilus
Journal of vacuum science & technology : B Microelectronics and nanometer structures processing, measurement and phenomena
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| 200 | 1 | |a Journal of vacuum science & technology |h B |i Microelectronics and nanometer structures processing, measurement and phenomena | |
| 207 | 0 | |a 2nd ser., v. 9, no. 1 (Jan./Feb. 1991)-2nd ser.,v.27, no6 (Nov/Dec. 2009) | |
| 210 | |a New York |c Published for the Society by the American Institute of Physics |d 1991-2009 | ||
| 326 | |a Bimestriel | ||
| 430 | | | |0 037637541 |t Journal of vacuum science & technology. B, Microelectronics processing and phenomena |x 0734-211X | |
| 440 | | | |0 159872308 |t Journal of vacuum science and technology. B, Nanotechnology & microelectronics (Print) |x 2166-2746 | |
| 452 | | | |0 040651495 |t Journal of vacuum science & technology. B, Microelectronics and nanometer structures (Online) |x 1520-8567 | |
| 488 | | | |0 040628590 |t JVST. A & B (CD-ROM ed.) |x 1071-8028 | |
| 488 | | | |0 038050951 |t Proceedings of the Molecular Beam Epitaxy Workshop |x 1069-3351 | |
| 488 | | | |0 038043750 |t Proceedings of the U.S. Workshop on the Physics and Chemistry of Mercury Cadmium Telluride and Related II-VI Compounds |x 1063-9039 | |
| 488 | | | |0 040314308 |t Papers from the International Symposium on Electron, Ion, and Photon Beams |x 1073-0788 | |
| 488 | | | |t Papers from the ... International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication | |
| 488 | | | |0 040319296 |t Papers from the North American Conference on Molecular Beam Epitaxy |x 1074-9721 | |
| 488 | | | |0 038049813 |t Proceedings of the International Vacuum Microelectronics Conference |x 1068-4182 | |
| 517 | | | |a Journal of vacuum science and technology B, Microelectronics and nanometer structures | |
| 517 | | | |a Microelectronics and nanometer structures | |
| 517 | | | |a JVST B | |
| 530 | 1 | |a Journal of vacuum science & technology. B, Microelectronics and nanometer structures | |
| 531 | |a J. vac. sci. technol., B, Microelectron. nanometer struct. | ||
| 606 | |3 PPN027247015 |a Physique |2 rameau | ||
| 608 | |3 PPN02724640X |a Périodiques |2 rameau | ||
| 676 | |a 621.381/05 | ||
| 710 | 0 | 2 | |3 PPN032194285 |a American vacuum society |4 070 |
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| 801 | 3 | |a FR |b ISSN |c 20170628 | |
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| 955 | 4 | 1 | |5 441092104:765338270 |a 28 |b 1 |j jan |i 2010 |a 33 |b 1 |j jan |i 2015 |r vol. 28 no. 1 (jan-2010) - vol. 33 no. 1 (jan-2015) |
| 937 | |a BU Sciences |c : Vol. 28 no. 1 (jan 2010) - Vol. 33 no. 1 (jan 2015) | ||
| 998 | |a 371265 | ||