VANCOUVER Edition Citation

1.
Journal of vacuum science & technology. New York: Published for the Society by the American Institute of Physics; 2024.

ISO690 Edition Citation

Journal of vacuum science & technology. New York : Published for the Society by the American Institute of Physics, 14 juin 2024

Style de citation APA (7e éd.)

American vacuum society. (2009). Journal of vacuum science & technology: B Microelectronics and nanometer structures processing, measurement and phenomena. Published for the Society by the American Institute of Physics.

Style de citation MLA (8e éd.)

American vacuum society. Journal of Vacuum Science & Technology: B Microelectronics and Nanometer Structures Processing, Measurement and Phenomena. Published for the Society by the American Institute of Physics, 2009.

Attention : ces citations peuvent ne pas être correctes à 100%.