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Electroceramic-Based MEMS : Fabrication-Technology and Applications
The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...
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| Auteur principal : | |
|---|---|
| Format : | Livre |
| Langue : | anglais |
| Titre complet : | Electroceramic-Based MEMS : Fabrication-Technology and Applications / edited by Nava Setter. |
| Édition : | 1st ed. 2005. |
| Publié : |
New York, NY :
Springer US
, [20..] Cham : Springer Nature |
| Collection : | Electronic Materials: Science & Technology ; 9 |
| Accès en ligne : |
Accès Nantes Université
Accès direct soit depuis les campus via le réseau ou le wifi eduroam soit à distance avec un compte @etu.univ-nantes.fr ou @univ-nantes.fr |
| Note sur l'URL : | Accès sur la plateforme de l'éditeur Accès sur la plateforme Istex |
| Condition d'utilisation et de reproduction : | Conditions particulières de réutilisation pour les bénéficiaires des licences nationales : https://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 |
| Contenu : | Applications and Devices. MEMS-Based Thin Film and Resonant Chemical Sensors. Microactuators Based on Thin Films. Micromachined Ultrasonic Transducers and Acoustic Sensors Based on Piezoelectric Thin Films. Thick-Film Piezoelectric and Magnetostrictive Devices. Micromachined Infrared Detectors Based on Pyroelectric Thin Films. RF Bulk Acoustic Wave Resonators and Filters. High Frequency Tuneable Devices Based on Thin Ferroelectric Films. MEMS for Optical Functionality. Materials, Fabrication-Technology, and Functionality. Ceramic Thick Films for MEMS. Thin Film Piezoelectrics for MEMS. Science and Technology of High Dielectric Constant Thin Films and Materials Integration for Application to High Frequency Devices. Permittivity, Tunability and Loss in Ferroelectrics for Reconfigurable High Frequency Electronics. Microfabrication of Piezoelectric MEMS. Non-Conventional Micro- and Nanopatterning Techniques for Electroceramics. Low-Cost Patterning of Ceramic Thin Films |
| Sujets : | |
| Documents associés : | Autre format:
Electroceramic-based MEMS Autre format: Electroceramic-Based MEMS Autre format: Künstliche Intelligenz |