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Catherine Yves
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Catherine Yves
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Recherches sur les décharges capacitives en haute fréquence
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Catherine
Yves
1970
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Formation et caractérisation des couches minces amorphes Six C1x : H déposées par plasma
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Catherine
Yves
1981
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Related Subjects
couches minces amorphes, réacteur de dépôt, analyse
décharge haute fréquence (hf) en couplage capacitif, plasma
décharges résonantes
films minces inorganiques, dépôt par plasma
gaz, ionisation
mélange méthane - silane
mélange éthylène - silane
plasma phase gazeuse
sondes doubles dans plasma hf
spectrométrie de masse phase gazeuse
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