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Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures
This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use...
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| Auteur principal : | |
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| Format : | Livre |
| Langue : | anglais |
| Titre complet : | Shape and Functional Elements of the Bulk Silicon Microtechnique : A Manual of Wet-Etched Silicon Structures / by Joachim Frühauf. |
| Publié : |
Berlin, Heidelberg :
Springer Berlin Heidelberg
, 2005 Cham : Springer Nature |
| Accès en ligne : |
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| Condition d'utilisation et de reproduction : | Conditions particulières de réutilisation pour les bénéficiaires des licences nationales : chttps://www.licencesnationales.fr/springer-nature-ebooks-contrat-licence-ln-2017 |
| Sujets : | |
| Documents associés : | Autre format:
Shape and Functional Elements of the Bulk Silicon Microtechnique Autre format: Shape and Functional Elements of the Bulk Silicon Microtechnique Autre format: Shape and Functional Elements of the Bulk Silicon Microtechnique |
| Résumé : | This methodic manual presents a survey of the form-related and functional elements of the bulk silicon microtechnique. It gives a systematic description of simple shape elements and of elements for mechanical, fluidic and optical applications. This manual includes practical instructions for the use of the relevant techniques and an extensive collection of examples for the support of the search for applications via photographs, drawings and references. It serves as a valuable guide to the design of etch masks and processes while summarizing the important properties of silicon, especially aiming at producers of sensors and microtechnical components, as well as producers of components of precision engineering and optical applications. |
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| ISBN : | 978-3-540-26876-5 |
| DOI : | 10.1007/b138230 |