Semiconductor manufacturing handbook
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Other Authors : | |
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Format : | Book |
Language : | anglais |
Title statement : | Semiconductor manufacturing handbook / Hwaiyu Geng, editor in chief |
Published : |
New York :
McGraw-Hill
, cop. 2005 |
Physical Description : | 1 vol. (pagin. var.) |
Series : | McGraw-Hill handbooks |
Subjects : |
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