Journal of vacuum science & technology : B : Microelectronics processing and phenomena

Journal of vacuum science & technology : B Microelectronics processing and phenomena

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Bibliographic Details
Main Author : American vacuum society (Directeur de publication)
Corporate Author : American institute of physics (Auteur, Directeur de publication)
Format : Journal
Language : anglais
Title statement : Journal of vacuum science & technology. B, Microelectronics processing and phenomena
Published : New York, N.Y : Published for the Society by the American Institute of Physics , 1983-1990
Subjects :
Vide (technologie)
Périodiques
Related Items : Continues in part: Journal of vacuum science & technology
Continued by: Journal of vacuum science & technology. B, Microelectronics and nanometer structures
Additional physical form: Journal of vacuum science & technology. B, Microelectronics processing and phenomena (Online)
Related to: Proceedings of the International Symposium on Electron, Ion, and Photon Beams
Related to: Proceedings of the Molecular Beam Epitaxy Workshop
Related to: Proceedings of the Annual Conference on the Physics and Chemistry of Semiconductor Interfaces