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| 001 |
PPN026064154 |
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20181221013700.0 |
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DYNIX_BUNAN_401422 |
| 010 |
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|a 0849394511
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| 100 |
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|a 20000320d1997 u0frey0103 ba
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| 101 |
0 |
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|a eng
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| 102 |
|
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|a US
|
| 200 |
0 |
1 |
|a Fundamentals of microfabrication
|f Marc Madou
|
| 210 |
|
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|a Boca Raton
|c CRC Press
|d 1997
|
| 215 |
|
|
|a 589 p.
|c ill.
|d 29 cm
|
| 606 |
0 |
0 |
|a Microélectronique
|
| 606 |
0 |
0 |
|a Lasers
|x Applications industrielles
|
| 606 |
0 |
0 |
|a Mécatronique
|
| 700 |
0 |
1 |
|a Madou
|b Marc
|
| 801 |
|
|
|a FR
|b DYNIX_BUNAN
|c 20000320
|g AFNOR
|
| 979 |
|
|
|a ECN
|
| 993 |
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|a 1142196695
|b ECN
|c 621.313 MAD
|d ECN1
|e ECN1
|f I
|g 20-03-2000
|h 28-03-2000
|o 09-07-2003
|p 3
|s 12909
|t ECN1
|u ECN1
|v i
|
| 998 |
|
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|a 66128
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Nantilus
