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1 |
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|a Fundamentals of microelectronics processing
|f Hong H. Lee
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|a New York
|c McGraw-Hill
|d c1990
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|a xvi, 514 p.
|c ill.
|d 25 cm
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| 225 |
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|a McGraw-Hill chemical engineering series
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| 320 |
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|a Includes bibliographies and index.
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| 410 |
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| |
|0 013288172
|t McGraw-Hill chemical engineering series
|f editorial advisory board James J. Carberry,... Max S. Peters,... William R. Schowalter,... James Wei,.
|c New York
|n McGraw-Hill
|d 19XX-
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