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Lemperière Georges
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Lemperière Georges
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Lemperière Georges
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INFLUENCE DES PARAMETRES D'UNE DECHARGE DE PULVERISATION DIODE, CONTINUE, SUR LA CINETIQUE DE DEFORMATION ET LA STRUCTURE DE COUCHES MINCES DE TITANE ET DE NITRURE DE TITANE
by
Lempérière
Georges
[s.n.] 1985
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2
Recherches sur l'émission secondaire de l'eau par bombardement électronique
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Lempérière
Georges
[s.n] 1970
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3
Analyse en énergie des ions et des électrons arrivant sur un substrat polarisé négativement dans deux décharges de pulvérisation : influence des bombardements ionique et électroniq...
by
Jouan Pierre-Yves
,
Lemperière
Georges
1992
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Related Subjects
analyse par faisceau d'ions
couche mince/cristallisation/effet pression/microscopie electronique balayage/pulverisation cathodique/diffraction rx/structure cristalline/grosseur grain/microstructure/polarisation cathodique/metal transition/etude experimentale/decharge produite par faisceau/pulverisation reactive/tension polarisation/titane nitrure/metal pur ti
couches minces, nitrure de titane (microélectronique)
décharge de pulvérisation r.f. planar magnétron
polarisation du substrat (couches minces)
pulvérisation cathodique
sciences appliquees/physique : metaux, metallurgie/etat condense : proprietes mecaniques et thermiques
spectroscopie électronique
thin film/crystallization/pressure effect/scanning electron microscopy/cathode sputtering/x ray diffraction/crystal structure/grain size/microstructure/cathodic polarization/transition metal/experimental study/beam produced discharge/cathodic sputtering/reactive sputtering/crystalline structure/bias voltage/titanium nitrides
thèses et écrits académiques
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