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Boufnichel Mohamed
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Boufnichel Mohamed
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Boufnichel Mohamed
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Simulation multi-échelle de la gravure profonde du silicium par procédé Bosch
by
Pateau Amand
,
Rhallabi Ahmed
,
Boufnichel
Mohamed
,
Roqueta Fabrice
,
Talneau Anne
Dollet Alain
Cardinaud Christophe
[éditeur inconnu] 2014
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2
Simulation multi-échelle de la gravure profonde du silicium par procédé Bosch
by
Pateau Amand
,
Rhallabi Ahmed
,
Boufnichel
Mohamed
,
Roqueta Fabrice
,
Talneau Anne
Dollet Alain
Yousfi Mohammed
Cardinaud Christophe
2014
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3
Modélisation de la gravure profonde du silicium en plasmas fluorés : étude du procédé BOSCH : simulations et calibration expérimentale
by
Le Dain Guillaume
,
Rhallabi Ahmed
,
Cardinaud Christophe
,
Hassouni Khaled
,
Yousfi Mohammed
,
Talneau Anne
,
Marcos Grégory
,
Boufnichel
Mohamed
,
Roqueta Fabrice
2018
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Related Subjects
gravure par plasma
gravure profonde
silicium
simulation
thèses et écrits académiques
composites polymères
gravure par plasma thèses et écrits académiques
plasmas froids
plasmas froids thèses et écrits académiques
procédé bosch
silicium couches minces
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